Method and device for imaging a mask onto a substrate
A Standard patent application filed on 11 April 2003 credited to Kaplan, Roland ; Sollner, Jurgen

Details

Application number :

2003227607  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for imaging a mask onto a substrate  

Inventor :

Kaplan, Roland ; Sollner, Jurgen  

Agent name :

 

Address for service :

 

Filing date :

11 April 2003  

Associated companies :

 

Applicant name :

HEIDELBERG INSTRUMENTS MIKROTECHNIK GMBH  

Applicant address :

Tullastrasse 2, 69126 Heidelberg  

Old name :

 

Original Source :

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