Process modules for transport polymerization of low dieletric constant thin films
A Standard patent application filed on 03 April 2003 credited to Kumar, Atul ; Nguyen, Binh ; Lee, Chung J. ; Lee, Wei Shiang Charles ; Solomensky, Michael ; Nguyen, Oanh ; Chang, James Yu Chung

Details

Application number :

2003226238  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Process modules for transport polymerization of low dieletric constant thin films  

Inventor :

Kumar, Atul ; Nguyen, Binh ; Lee, Chung J. ; Lee, Wei Shiang Charles ; Solomensky, Michael ; Nguyen, Oanh ; Chang, James Yu Chung  

Agent name :

 

Address for service :

 

Filing date :

03 April 2003  

Associated companies :

 

Applicant name :

DIELECTRIC SYSTEMS, INC.  

Applicant address :

45500 Northport Loop West, Fremont, CA 94538  

Old name :

 

Original Source :

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