Details
- Application number :
- 2003224565
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method, device and computer program product for lithography
- Inventor :
- Olsson, Lennart
- Agent name :
-
- Address for service :
-
- Filing date :
- 24 April 2003
- Associated companies :
-
- Applicant name :
- OBDUCAT AB
- Applicant address :
- P.O. Box 580, S-201 25 Malmo
- Old name :
-
- Original Source :
- Go