High power deep ultraviolet laser with long life optics
A Standard patent application filed on 23 April 2003 credited to Ershov, Alexander I. ; Pan, Xiaojiang ; Marsh, Elizabeth ; Glatzel, Holger K. ; Algots, John M. ; Melchior, John T. ; Lublin, Leonard ; Ball, Matthew ; Webb, R. Kyle ; Ujazdowki, Richard C. ; Morton, Richard D. ;

Details

Application number :

2003223725  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

High power deep ultraviolet laser with long life optics  

Inventor :

Ershov, Alexander I. ; Pan, Xiaojiang ; Marsh, Elizabeth ; Glatzel, Holger K. ; Algots, John M. ; Melchior, John T. ; Lublin, Leonard ; Ball, Matthew ; Webb, R. Kyle ; Ujazdowki, Richard C. ; Morton, Richard D. ;  

Agent name :

 

Address for service :

 

Filing date :

23 April 2003  

Associated companies :

 

Applicant name :

CYMER, INC.  

Applicant address :

(a Nevada corporation), 17075 Thornmint Court, San Diego, CA 92127  

Old name :

 

Original Source :

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