Method for production of a layer of silicon carbide or a nitride of a group iii element on a suitable substrate
A Standard patent application filed on 13 February 2003 credited to Leycuras, Andre
Details
Application number :
2003222909
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for production of a layer of silicon carbide or a nitride of a group iii element on a suitable substrate