Details
- Application number :
- 2003220252
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Wafer characteristics via reflectometry
- Inventor :
- Sopori, Bhushan L.
- Agent name :
-
- Address for service :
-
- Filing date :
- 14 March 2003
- Associated companies :
-
- Applicant name :
- MIDWEST RESEARCH INSTITUTE
- Applicant address :
- 425 Volker Boulevard, Kansas City, MO 64110
- Old name :
-
- Original Source :
- Go