Details
- Application number :
- 2003218389
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Tantalum barrier removal solution
- Inventor :
- Bian, Jinru
- Agent name :
-
- Address for service :
-
- Filing date :
- 25 March 2003
- Associated companies :
-
- Applicant name :
- Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Applicant address :
- Suite 1300, 1105 North Market Street, Wilmington, DE 19899
- Old name :
-
- Original Source :
- Go