Details

Application number :
2003218389  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Tantalum barrier removal solution  
Inventor :
Bian, Jinru  
Agent name :
 
Address for service :
 
Filing date :
25 March 2003  
Associated companies :
 
Applicant name :
Rohm and Haas Electronic Materials CMP Holdings, Inc.  
Applicant address :
Suite 1300, 1105 North Market Street, Wilmington, DE 19899  
Old name :
 
Original Source :
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Same Inventor