Drying resist with a solvent bath and supercritical co2
A Standard patent application filed on 14 February 2003 credited to Awtrey, Allan Wendell
;
Shilling, Paul
;
Ryza, Nicholas Alan
;
Arena-Foster, Chantal J.
Details
Application number :
2003217547
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Drying resist with a solvent bath and supercritical co2
Inventor :
Awtrey, Allan Wendell
;
Shilling, Paul
;
Ryza, Nicholas Alan
;
Arena-Foster, Chantal J.