Apparatus and method for depositing organic matter of vapor phase
A Standard patent application filed on 27 March 2003 credited to Choi, Dong-Kwon
;
Bae, Kyung-Bin
;
Kim, Dong-Soo
Details
Application number :
2003217530
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and method for depositing organic matter of vapor phase