Method and apparatus for actuation of a two-axis mems device using three actuation elements
A Standard patent application filed on 03 March 2003 credited to Dickson, William C.
;
Fernandez, Andres
Details
Application number :
2003216497
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for actuation of a two-axis mems device using three actuation elements