Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
A Standard patent application filed on 21 March 2003 credited to Murrell, Adrian ; Harrison, Bernard ; Roberts, Frank D. ; Smick, Theodore H. ; Farley, Marvin ; Edwards, Peter ; Sakase, Takao ; Ryding, Geoffrey

Details

Application number :

2003214434  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Multi-directional scanning of movable member and ion beam monitoring arrangement therefor  

Inventor :

Murrell, Adrian ; Harrison, Bernard ; Roberts, Frank D. ; Smick, Theodore H. ; Farley, Marvin ; Edwards, Peter ; Sakase, Takao ; Ryding, Geoffrey  

Agent name :

 

Address for service :

 

Filing date :

21 March 2003  

Associated companies :

 

Applicant name :

APPLIED MATERIALS INC.  

Applicant address :

3050 Bowers Avenue, Santa Clara, CA 95054  

Old name :

 

Original Source :

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