Details
- Application number :
- 2003213000
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Reactor assembly and processing method
- Inventor :
- Kinnard, David
;
Ferris, David
- Agent name :
-
- Address for service :
-
- Filing date :
- 10 February 2003
- Associated companies :
-
- Applicant name :
- AXCELIS TECHNOLOGIES, INC.
- Applicant address :
- 55 Cherry Hill Drive, Beverly, MA 01915-1053
- Old name :
-
- Original Source :
- Go