Details

Application number :
2003213000  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Reactor assembly and processing method  
Inventor :
Kinnard, David ; Ferris, David  
Agent name :
 
Address for service :
 
Filing date :
10 February 2003  
Associated companies :
 
Applicant name :
AXCELIS TECHNOLOGIES, INC.  
Applicant address :
55 Cherry Hill Drive, Beverly, MA 01915-1053  
Old name :
 
Original Source :
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