Gas driven planetary rotation apparatus and methods for forming silicon carbide layers
A Standard patent application filed on 04 February 2003 credited to Paisley, Michael James
;
Sumakeris, Joseph John
Details
Application number :
2003212902
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Gas driven planetary rotation apparatus and methods for forming silicon carbide layers