Moire method and measuring system for measuring the distortion of an optical imaging system
A Standard patent application filed on 06 March 2003 credited to Stuehler, Joachim ; Schellhorn, Uwe ; Wegmann, Ulrich ; Klaesges, Ralph

Details

Application number :

2003212309  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Moire method and measuring system for measuring the distortion of an optical imaging system  

Inventor :

Stuehler, Joachim ; Schellhorn, Uwe ; Wegmann, Ulrich ; Klaesges, Ralph  

Agent name :

 

Address for service :

 

Filing date :

06 March 2003  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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