Details
- Application number :
- 2003209416
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Stiction alleviation using passivation layer patterning
- Inventor :
- Prophet, Eric M.
- Agent name :
-
- Address for service :
-
- Filing date :
- 29 January 2003
- Associated companies :
-
- Applicant name :
- SUPERCONDUCTOR TECHNOLOGIES, INC.
- Applicant address :
- 460 Ward Drive, Suite F, Santa Barbara, CA 93111-2310
- Old name :
-
- Original Source :
- Go