Use of electronic speckle interferometry for defect detection in fabricated devices
A Standard patent application filed on 03 February 2003 credited to Peterson, Michael L. Jr ; Dileo, Anthony J.

Details

Application number :
2003207846  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Use of electronic speckle interferometry for defect detection in fabricated devices  
Inventor :
Peterson, Michael L. Jr ; Dileo, Anthony J.  
Agent name :
 
Address for service :
 
Filing date :
03 February 2003  
Associated companies :
 
Applicant name :
PETERSON, Michael, L., Jr  
Applicant address :
61 Bennoch Road, Orono, ME 04473  
Old name :
 
Original Source :
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Same Inventor