Interference measuring method, interference measuring device, production method for projection optical system, projection optical system, and projection aligner
A Standard patent application filed on 16 January 2003 credited to Takigawa, Yuichi
;
Komatsuda, Hideki
Details
Application number :
2003203168
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Interference measuring method, interference measuring device, production method for projection optical system, projection optical system, and projection aligner
Inventor :
Takigawa, Yuichi
;
Komatsuda, Hideki
Agent name :
Address for service :
Filing date :
16 January 2003
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331