Lighting system comprising a nested collector for annularly illuminating an exit pupil
A Standard patent application filed on 20 January 2003 credited to Sohmen, Eric ; Singer, Wolfgang ; Wangler, Johannes

Details

Application number :

2003202578  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Lighting system comprising a nested collector for annularly illuminating an exit pupil  

Inventor :

Sohmen, Eric ; Singer, Wolfgang ; Wangler, Johannes  

Agent name :

 

Address for service :

 

Filing date :

20 January 2003  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Stasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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