Method of fabricating micro-electromechanical switches on cmos compatible substrates
A Standard patent application filed on 07 November 2002 credited to Cote, Donna R. ; Bisson, John C. ; Stein, Kenneth J. ; Dalton, Timothy J. ; Volant, Richard P. ; Groves, Robert A. ; Subbanna, Seshadri ; Petrarca, Kevin S.

Details

Application number :

2002365158  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of fabricating micro-electromechanical switches on cmos compatible substrates  

Inventor :

Cote, Donna R. ; Bisson, John C. ; Stein, Kenneth J. ; Dalton, Timothy J. ; Volant, Richard P. ; Groves, Robert A. ; Subbanna, Seshadri ; Petrarca, Kevin S.  

Agent name :

 

Address for service :

 

Filing date :

07 November 2002  

Associated companies :

 

Applicant name :

INTERNATIONAL BUSINESS MACHINES CORPORATION  

Applicant address :

New Orchard Road, Armonk, NJ 10504  

Old name :

 

Original Source :

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