Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein
A Standard patent application filed on 23 October 2002 credited to Chang-Chien, Patty P. L. ; Wise, Kensall D.

Details

Application number :

2002365139  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein  

Inventor :

Chang-Chien, Patty P. L. ; Wise, Kensall D.  

Agent name :

 

Address for service :

 

Filing date :

23 October 2002  

Associated companies :

 

Applicant name :

THE REGENTS OF THE UNIVERSITY OF MICHIGAN  

Applicant address :

3003 S. State Street, Ann Arbor, MI 48109  

Old name :

 

Original Source :

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