Method of detecting, identifying and correcting process performance
A Standard patent application filed on 31 December 2002 credited to Donohue, John ; Yue, Hongyu

Details

Application number :

2002364140  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of detecting, identifying and correcting process performance  

Inventor :

Donohue, John ; Yue, Hongyu  

Agent name :

 

Address for service :

 

Filing date :

31 December 2002  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

TBS Broadcast Center, 3-6 Akasaka 5-chome, Minato-ku, Tokyo 107-8481  

Old name :

 

Original Source :

Go  

Same Inventor

• Method of fault detection for material process system