Imaging device in a projection exposure facility
A Standard patent application filed on 17 December 2002 credited to Kohl, Alexander ; Hummel, Wolfgang ; Merz, Erich ; Holderer, Hubert ; Weber, Jochen ; Lippert, Johannes ; Fischer, Juergen ; Aubele, Karl-Eugen ; Rief, Klaus ; Neumaier, Markus ; Muehlbeyer, Michael ;

Details

Application number :

2002363876  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Imaging device in a projection exposure facility  

Inventor :

Kohl, Alexander ; Hummel, Wolfgang ; Merz, Erich ; Holderer, Hubert ; Weber, Jochen ; Lippert, Johannes ; Fischer, Juergen ; Aubele, Karl-Eugen ; Rief, Klaus ; Neumaier, Markus ; Muehlbeyer, Michael ;  

Agent name :

 

Address for service :

 

Filing date :

17 December 2002  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen, Germany  

Old name :

 

Original Source :

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