Details

Application number :
2002359867  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system  
Inventor :
Zhou, Ren ; Pham, Xuyen ; Quach, Vien ; Nguyen, Tuan  
Agent name :
 
Address for service :
 
Filing date :
23 December 2002  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538  
Old name :
 
Original Source :
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