System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system
A Standard patent application filed on 23 December 2002 credited to Zhou, Ren ; Pham, Xuyen ; Quach, Vien ; Nguyen, Tuan

Details

Application number :

2002359867  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

System and method for point of use delivery, control and mixing chemical and slurry for cmp/cleaning system  

Inventor :

Zhou, Ren ; Pham, Xuyen ; Quach, Vien ; Nguyen, Tuan  

Agent name :

 

Address for service :

 

Filing date :

23 December 2002  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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