Front opening wafer carrier with path to ground effectuated by door
A Standard patent application filed on 26 November 2002 credited to Tieben, Anthony Mathias ; Kalia, Suraj ; Bores, Gregory

Details

Application number :

2002359492  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Front opening wafer carrier with path to ground effectuated by door  

Inventor :

Tieben, Anthony Mathias ; Kalia, Suraj ; Bores, Gregory  

Agent name :

 

Address for service :

 

Filing date :

26 November 2002  

Associated companies :

 

Applicant name :

ENTEGRIS INC.  

Applicant address :

3500 Lyman Boulevard, Chaska, MN 55318  

Old name :

 

Original Source :

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