Polishing pad comprising particles with a solid core and polymeric shell
A Standard patent application filed on 19 November 2002 credited to Cherian, Isaac K.
;
Grumbine, Steven K.
;
Anjur, Sriram P.
Details
Application number :
2002359422
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Polishing pad comprising particles with a solid core and polymeric shell
Inventor :
Cherian, Isaac K.
;
Grumbine, Steven K.
;
Anjur, Sriram P.
Agent name :
Address for service :
Filing date :
19 November 2002
Associated companies :
Applicant name :
CABOT MICROELECTRONICS CORPORATION
Applicant address :
A Delaware corporation, 870 North Commons Drive, Aurora, IL 60504