Method and system for monitoring a process of material removal from the surface of a patterned structure
A Standard patent application filed on 04 December 2002 credited to Weingarten, Amit ; Machavariani, Vladimir ; Scheiner, David ; Ravid, Avi

Details

Application number :

2002358939  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and system for monitoring a process of material removal from the surface of a patterned structure  

Inventor :

Weingarten, Amit ; Machavariani, Vladimir ; Scheiner, David ; Ravid, Avi  

Agent name :

 

Address for service :

 

Filing date :

04 December 2002  

Associated companies :

 

Applicant name :

NOVA MEASURING INSTRUMENTS LTD.  

Applicant address :

Weizmann Science Park, P.O. Box 266, 76100 Rehovoth  

Old name :

 

Original Source :

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