Semiconductor wafer carrier mapping sensor
A Standard patent application filed on 16 December 2002 credited to Schuda, Felix J.

Details

Application number :

2002357241  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Semiconductor wafer carrier mapping sensor  

Inventor :

Schuda, Felix J.  

Agent name :

 

Address for service :

 

Filing date :

16 December 2002  

Associated companies :

 

Applicant name :

CYBEROPTICS SEMICONDUCTOR, INC.  

Applicant address :

13555 SW Millikan Way, Beaverton, OR 97005, United States of America  

Old name :

 

Original Source :

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