High-purity aluminum sputter targets
A Standard patent application filed on 23 October 2002 credited to Perry, Andrew C. ; Hunt, Thomas J. ; Gilman, Paul S.

Details

Application number :

2002356835  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

High-purity aluminum sputter targets  

Inventor :

Perry, Andrew C. ; Hunt, Thomas J. ; Gilman, Paul S.  

Agent name :

 

Address for service :

 

Filing date :

23 October 2002  

Associated companies :

 

Applicant name :

PRAXAIR S.T. TECHNOLOGY, INC.  

Applicant address :

441 Sackett Point Road, North Haven, CT 06473  

Old name :

 

Original Source :

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