Details

Application number :
2002356606  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Mirror facet and facetted mirror  
Inventor :
Heisler, Andreas ; Seifert, Andreas ; Melzer, Frank ; Singer, Wolfgang ; Holderer, Hubert ; Weiss, Markus ; Mann, Heinz  
Agent name :
 
Address for service :
 
Filing date :
15 November 2002  
Associated companies :
 
Applicant name :
CARL ZEISS SMT AG  
Applicant address :
Carl-Zeiss-Strasse 22, 73447 Oberkochen  
Old name :
 
Original Source :
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Same Inventor