Tunable multi-zone gas injection system
A Standard patent application filed on 09 October 2002 credited to Cooperberg, David J. ; Ratto, Douglas ; Vahedi, Vahid ; Benjamin, Neil ; Singh, Harmeet

Details

Application number :

2002356543  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Tunable multi-zone gas injection system  

Inventor :

Cooperberg, David J. ; Ratto, Douglas ; Vahedi, Vahid ; Benjamin, Neil ; Singh, Harmeet  

Agent name :

 

Address for service :

 

Filing date :

09 October 2002  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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