Details
- Application number :
- 2002356488
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- A method of alignment by using interferometry
- Inventor :
- Sandstrom, Torbjorn
- Agent name :
-
- Address for service :
-
- Filing date :
- 05 December 2002
- Associated companies :
-
- Applicant name :
- MICRONIC LASER SYSTEMS AB
- Applicant address :
- IPR AND Legal Department, Nytorpsvagen 9, S-183 03 Taby
- Old name :
-
- Original Source :
- Go