Details
- Application number :
- 2002354773
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma pump with inter-stage plasma source
- Inventor :
- Johnson, Wayne L.
;
Quon, Bill H.
- Agent name :
-
- Address for service :
-
- Filing date :
- 02 July 2002
- Associated companies :
-
- Applicant name :
- TOKYO ELECTRON LIMITED
- Applicant address :
- TBS Broadcast Center, 3-6, Akasak 5-chome, Minato-ku, Tokyo 107
- Old name :
-
- Original Source :
- Go