Reflective illuminating optical element, reflective illuminating optical system, and duv to euv exposure device
A Standard patent application filed on 05 December 2002 credited to Takahashi, Tomowaki
;
Mitarai, Kiyoshi
Details
Application number :
2002354418
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Reflective illuminating optical element, reflective illuminating optical system, and duv to euv exposure device
Inventor :
Takahashi, Tomowaki
;
Mitarai, Kiyoshi
Agent name :
Address for service :
Filing date :
05 December 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331