Single wafer dryer and drying methods
A Standard patent application filed on 01 November 2002 credited to Lerner. Alexander ; Fishkin, Boris ; Govzman, Boris T. ; Shirazi, Guy ; Achkire, Younes ; Sugarman, Michael ; Mavleiv, Rashid ; Li, Shijian ; Fang, Haoquan

Details

Application number :

2002353946  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Single wafer dryer and drying methods  

Inventor :

Lerner. Alexander ; Fishkin, Boris ; Govzman, Boris T. ; Shirazi, Guy ; Achkire, Younes ; Sugarman, Michael ; Mavleiv, Rashid ; Li, Shijian ; Fang, Haoquan  

Agent name :

 

Address for service :

 

Filing date :

01 November 2002  

Associated companies :

 

Applicant name :

APPLIED MATERIALS, INC.  

Applicant address :

3050 Bowers Avenue, Santa Clara, CA 95024  

Old name :

 

Original Source :

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