System and method for depth profiling and characterization of thin films
A Standard patent application filed on 24 October 2002 credited to Watson, David G. ; Larson, Paul E. ; Moulder, John E. ; Perloff, David S.

Details

Application number :

2002353876  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

System and method for depth profiling and characterization of thin films  

Inventor :

Watson, David G. ; Larson, Paul E. ; Moulder, John E. ; Perloff, David S.  

Agent name :

 

Address for service :

 

Filing date :

24 October 2002  

Associated companies :

 

Applicant name :

PHYSICAL ELECTRONICS, INC.  

Applicant address :

6509 Flying Cloud Drive, Eden Prairie, MN 55344  

Old name :

 

Original Source :

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