Details
- Application number :
- 2002353038
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Phase-shifting interferometry method and system
- Inventor :
- Deck, Leslie L.
- Agent name :
-
- Address for service :
-
- Filing date :
- 04 December 2002
- Associated companies :
-
- Applicant name :
- ZYGO CORPORATION
- Applicant address :
- 21 Laurel Brook Road, Middlefield, CT 06455-0448
- Old name :
-
- Original Source :
- Go