Method for forming thin film, substrate having thin film formed by the method, and photoelectric conversion device using the substrate
A Standard patent application filed on 03 December 2002 credited to Fujisawa, Akira
;
Arai, Daisuke
;
Sueyoshi, Yukio
;
Yamamoto, Toru
;
Otani, Tsuyoshi
;
Ichiki, Kiyotaka
Details
Application number :
2002349757
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for forming thin film, substrate having thin film formed by the method, and photoelectric conversion device using the substrate