Electrostatic clampless holder module and cooling system
A Standard patent application filed on 03 December 2002 credited to Miyaji, Jun ; Kaneko, Kazuaki ; Tamaru, Masahiko ; Ikeda, Masayoshi ; Ikemura, Yoshiyuki ; Hirayama, Tadashi ; Takamura, Tomio ; Sago, Yasumi ; Tateno, Noriaki

Details

Application number :

2002349752  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Electrostatic clampless holder module and cooling system  

Inventor :

Miyaji, Jun ; Kaneko, Kazuaki ; Tamaru, Masahiko ; Ikeda, Masayoshi ; Ikemura, Yoshiyuki ; Hirayama, Tadashi ; Takamura, Tomio ; Sago, Yasumi ; Tateno, Noriaki  

Agent name :

 

Address for service :

 

Filing date :

03 December 2002  

Associated companies :

 

Applicant name :

CHOSHU INDUSTRY CO., LTD.  

Applicant address :

1371-7, Ohtsuka, Nishi-takatomari, Onoda-shi, Yamaguchi 756-0036  

Old name :

 

Original Source :

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