Method and system for compensating thermally induced motion of probe cards
A Standard patent application filed on 01 November 2002 credited to Eldridge, Benjamin N. ; Mathieu, Gaetan L. ; Grube, Gary W. ; Martens, Rod ; Shinde, Makarand S. ; Larder, Richard A. ; Matsubayashi, Ken S.

Details

Application number :

2002348145  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and system for compensating thermally induced motion of probe cards  

Inventor :

Eldridge, Benjamin N. ; Mathieu, Gaetan L. ; Grube, Gary W. ; Martens, Rod ; Shinde, Makarand S. ; Larder, Richard A. ; Matsubayashi, Ken S.  

Agent name :

 

Address for service :

 

Filing date :

01 November 2002  

Associated companies :

 

Applicant name :

FORMFACTOR, INC.  

Applicant address :

2140 Research Drive, Livermore, CA 94550  

Old name :

 

Original Source :

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