Protective layer for multilayers exposed to hard x-rays
A Standard patent application filed on 31 October 2002 credited to Verman, Boris ; Platonov, Yuriy ; Seshadri, Srivatsan ; Joensen, Karsten

Details

Application number :

2002348141  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Protective layer for multilayers exposed to hard x-rays  

Inventor :

Verman, Boris ; Platonov, Yuriy ; Seshadri, Srivatsan ; Joensen, Karsten  

Agent name :

 

Address for service :

 

Filing date :

31 October 2002  

Associated companies :

 

Applicant name :

OSMIC, INC.  

Applicant address :

1900 Taylor Road, Auburn Hills, MI 48326  

Old name :

 

Original Source :

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