Details

Application number :
2002344629  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Optical element, method of manufacturing the optical element, optical system, exposure device, and method of manufacturing micro device  
Inventor :
Shibazaki, Yuichi  
Agent name :
 
Address for service :
 
Filing date :
01 November 2002  
Associated companies :
 
Applicant name :
NIKON CORPORATION  
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331  
Old name :
 
Original Source :
Go  

Same Inventor