Optical element, method of manufacturing the optical element, optical system, exposure device, and method of manufacturing micro device
A Standard patent application filed on 01 November 2002 credited to Shibazaki, Yuichi
Details
Application number :
2002344629
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Optical element, method of manufacturing the optical element, optical system, exposure device, and method of manufacturing micro device
Inventor :
Shibazaki, Yuichi
Agent name :
Address for service :
Filing date :
01 November 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331