Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method
A Standard patent application filed on 28 October 2002 credited to Matsumoto, Eiichi
;
Kido, Junji
;
Maki, Syuuji
;
Yanagi, Yuuji
;
Nakagawa, Teruo
;
Kishi, Yasuo
;
Kondo, Yukihiro
;
Nishimori, Taisuke
Details
Application number :
2002344591
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method