Zone plate, measuring method using it, and production method for projection optical system
A Standard patent application filed on 07 November 2002 credited to Nakayama, Shigeru
Details
Application number :
2002344478
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Zone plate, measuring method using it, and production method for projection optical system
Inventor :
Nakayama, Shigeru
Agent name :
Address for service :
Filing date :
07 November 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331