Method and device for gas displacement, mask protective device, mask, and method and device for exposure
A Standard patent application filed on 10 October 2002 credited to Nagasaka, Hiroyuki
Details
Application number :
2002344071
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and device for gas displacement, mask protective device, mask, and method and device for exposure
Inventor :
Nagasaka, Hiroyuki
Agent name :
Address for service :
Filing date :
10 October 2002
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331