Device and method for microwave plasma processing, and microwave power supply device
A Standard patent application filed on 18 October 2002 credited to Hirayama, Masaki ; Goto, Tetsuya ; Ohmi, Tadahiro ; Goto, Naohisa

Details

Application number :

2002344001  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Device and method for microwave plasma processing, and microwave power supply device  

Inventor :

Hirayama, Masaki ; Goto, Tetsuya ; Ohmi, Tadahiro ; Goto, Naohisa  

Agent name :

 

Address for service :

 

Filing date :

18 October 2002  

Associated companies :

 

Applicant name :

OHMI, Tadahiro  

Applicant address :

1-17-301, Komegafukuro 2-Chome, Aoba-Ku, Sendai-Shi, Miyagi 980-0813  

Old name :

 

Original Source :

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