Integrated equipment set for forming an interconnect on a substrate
A Standard patent application filed on 16 September 2002 credited to Hraiz, Pierre G.
;
Parikh, Suketu A.
;
Cheung, Robin
Details
Application number :
2002341677
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Integrated equipment set for forming an interconnect on a substrate
Inventor :
Hraiz, Pierre G.
;
Parikh, Suketu A.
;
Cheung, Robin