Acidic composition containing fluoride for removal of photoresists and etch residues
A Standard patent application filed on 04 January 2000 credited to Ward, Irl E.
;
Peters, Daryl W.
Details
Application number :
25989
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Acidic composition containing fluoride for removal of photoresists and etch residues