Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system
A Standard patent application filed on 12 July 2002 credited to Stoner, Robert J. ; Morath, Christopher

Details

Application number :

2002341544  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system  

Inventor :

Stoner, Robert J. ; Morath, Christopher  

Agent name :

 

Address for service :

 

Filing date :

12 July 2002  

Associated companies :

 

Applicant name :

RUDOLPH TECHNOLOGIES INC.  

Applicant address :

One Rudolph Road, Flanders, NJ 07836  

Old name :

 

Original Source :

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