Method of manufacturing a stamper, master plate, support structure and use of such a stamper
A Standard patent application filed on 22 October 2002 credited to Vromans, Petrus H. G. M.
Details
Application number :
2002341333
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of manufacturing a stamper, master plate, support structure and use of such a stamper