Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
A Standard patent application filed on 02 October 2002 credited to Yakshin, Andrey E. ; Louis, Eric ; Klein, Roman ; Bijkerk, Frederik ; Wedowski, Marco ; Stietz, Frank

Details

Application number :

2002340966  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device  

Inventor :

Yakshin, Andrey E. ; Louis, Eric ; Klein, Roman ; Bijkerk, Frederik ; Wedowski, Marco ; Stietz, Frank  

Agent name :

 

Address for service :

 

Filing date :

02 October 2002  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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